Chemical Energy Powered MEMS System

摘要：

　　In recent years,micro-/nano-fabrication technology has expended its applications from manufacturing miniatu rized mechanical/electrical systems to serving more complex biological/chemical/medical purposes.There are also increasing efforts of employing micro-/nano-technology to create electrical or mechanical power systems that promoted growing research in power-MEMS/NEMS area.

作者: Zhiyu Hu

作者单位: Institute of NanoMicroEnergy, Shanghai University NationalKey Laboratory of Science and Technology on Micro-/Nano-Fabrication Shanghai Jiao Tong University

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-1

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）