MEMS monolithic integration technology

摘要：

　　The monolithic integrated technology of MEMS was discussed.First discussed the advantages and difficulties faced by the MEMS monolithic integration technology.Second the features and the process of the mainstream MEMS monolithic integration technology was introduced.And finally put forward a SOI MEMS monolithic integration technology,the technology with no high-temperature process,Post-CMOS integrated solution,compatible with the CMOS process.This technology can achieve high aspect ratio,high-performance micro-inertial devices.

关键词： MEMS Monolithic integration Surface micromachining Bulk micromachining

作者: ZHANG Zhao-yun SHI Zhi-gui YANG Zhen-chuan ZHANG Hui ZHANG Hui

作者单位: Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621900, China National KeyLaboratory of Micro/Nano Fabrication Technology, Instute of Microelectronics, Peking Uni

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-6

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）