Special Shape Glassy Carbon Microelectrode based on Pyrolyzed Parylene C Process
A novel glassy carbon microelectrode with special shape is designed and fabricated.The micro-rod is covered by parylene C due to its conformal process and then pyrolyzed the parylene C film to form the glassy carbon microelectrode.The shape of micro-rod is with a tip diameter of 10μm after grinding,the change value of the tip diameter at the length of 100μm as small as possible.The orthogonal experiments are performed to optimize the process parameters.The experimental results show that the optimum parameters are with the Heat of 700,the Velocity of 40,the Delay of 140 and the Pull of 250 using the CO2 laser-based micropipette puller.Parylene C is deposited on micro-rod by CVD process.Parylene films are pyrolyzed in a furnace at 900℃ for 1 h under an inert N2 atmosphere,which converts the highly insulating parylene layer into a conductive carbon film.The procedures described here offer a route to fabrication of thin film carbon electrodes with special shape.
Microelectrode Orthogonal experiment Parylene C Pyrolyzed
Lingyun Zhang Jingquan Liu Bin Yang Chunsheng Yang
Science and Technology on Micro/Nano Fabrication Laboratory, Research Institute of Micro/NanoTechnology, Shanghai Jiao Tong University, 200240 Shanghai, China
国际会议
中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)
杭州
英文
1-6
2012-11-04（万方平台首次上网日期，不代表论文的发表时间）