Application of Laser Doppler technique in detecting the dynamic parameter of MEMS device

摘要：

　　In order to test the dynamic performance of MEMS devices accurately,the laser Doppler vibrometer was adopted to test the frequency characteristics and surface vibration of the MEMS scanning mirror.The measuring formulas of the object motion velocity and displacement were derived.A kind of MEMS scanning mirror was tested using the established optical testing system.The measurement results show that the resonance frequency characteristic and the transient response characteristic is 269Hz and 60ms respectively which are consistent with the theoretical analysis.The method has significant reference value to the application of the laser Doppler technique.

关键词： MEMS scanning mirror frequency characteristics laser Doppler testing

作者: GuangMin Yuan Weizheng Yuan YaoBo Liu HongLong Chang

作者单位: Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education,Xi’an,710072, China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-5

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）