Ultrasonic Energy Characteristics of ZnO Piezoelectric Thin Films Array Based on MEMS
The characteristics of the ultrasonic energy transference system with MEMS ZnO square piezoelectric thin films array (SPTFA) structure has been investigated in the article.Design principle of the system has been introduced,and the ultrasonic directivity has been enhanced by the films array structure.The silicon panel with the SPTFA structure has been successfully fabricated based on MEMS technology.The ultrasonic energy transference experiment has been carried out as well in order to check the capability of the system by means of two SPTFA panel.Experiment results show that the maximum power density is 2.581mW/cm2 when the amplitude of exciting voltage is 10V,and the light emitting diode is lightened successfully by the system in a distance of 3mm.
Ultrasonic energy characteristics Ultrasonic directivity ZnO piezoelectric thin film array MEMS
Shaohua Wu Zhonghua Gao Zhan Zhao Li Xiao Yundong Xuan
State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy ofSciences. State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy ofSciences.
国际会议
中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)
杭州
英文
1-4
2012-11-04（万方平台首次上网日期，不代表论文的发表时间）