A Micro-tensile Testing Chip Integrated Piezoresistive Cells for Tension Measurement and Axial Alignment

摘要：

　　Mechanical testing of micro/nano materials is very important for design,performance realization,and reliability analysis of micro and nano electromechanical systems (MEMS/NEMS).Mechanical characterization of micro/nano materials is rather difficult in the handling and alignment of the specimens,measurement of the displacement and the load for both the off-chip testing method and the integrated on-chip testing method.In the paper,a micro-tensile testing chip integrated piezoresistive cells and a specimen is developed to solve the problems of tension measurement and axial alignment.Based on the piezoresistive effect,the configuration of the chip,especially the parts of the cantilevers which carry the piezoresistive cells and the cells are designed,and the tensile force and non-axis alignment error can measured simultaneously.The chip is prepared with bulk micromachining of silicon.The performance of the chip is calibrated by using an off-chip actuated micro-tensile tester,and the sensitivity coefficient of the piezoresistive cells is equal to 0.017 mV/mN.

关键词： micro-tensile testing piezoresistive axial alignment

作者: Zhang Duanqin Yang Faliang Chu Jinkui

作者单位: Mechanical and Electrical Engineering Institute, Zhengzhou University of Light Industry,Zhengzhou, H Zhengzhou Yutong Heavy Industries Co. Ltd, Zhengzhou, Henan, China School of Mechanical Engineering, Dalian University of Technology, Dalian, Liaoning, China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-6

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）