Characteristic research of SOI rib waveguide resonators with SiO2 deposited

摘要：

　　With the extensive research and application of SOI nano-optical ring resonators,the problem of high integration becomes the bottleneck restricting its development.To research the effect of deposited SiO2 insulating layer on the resonance characteristic of SOI nano-waveguid ring cavity while integrating,a rib waveguide ring resonator with 500nm SiO2 insulating layer deposited was designed and fabricated in this paper.By testing the resonance transmission spectrum power of this structure,it is found that SiO2 insulating layer deposited has no effect on the grating vertical coupling efficiency while improves the quality factor to 14.000±1.000.

关键词： Silicon-on-insulator rib nano-waveguides microring resonator

作者: Zanang Junbin Xue Chenyang Wei Liping Wang Yonghua Cui Danfeng Zhang Wendong

作者单位: Science and Technology on Electronic Test & Measurement Laboratory(North University of China),Taiyua Science and Technology on Electronic Test & Measurement Laboratory(North University of China),Taiyua

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-4

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）