Temperature Model for a Vacuum Packaged MEMS Gyroscope Structure

摘要：

　　The influence of temperature’s variation upon the resonant frequency and damping of the Micro-Electro- Mechanical-System (MEMS) gyroscope’s silicon structure in the vacuum package is investigated in this article.The gyroscope’s working principle and the dual-mass decoupled gyroscope structure are introduced,the drive and sense modes’ frequencies are analyzed.The ideal models of resonant frequency and damping are established and the dominate elements of impacting the resonant frequency and lamping are Young Modulus,air viscosity coefficient and ambient pressure respectively.The experiments and the results proved that the frequency model works well,and the damping model only can simulate the tendency because of the air getter’s influence.

关键词： temperature MEMS gyroscope structure resonant frequency damping

作者: Huiliang Cao Hongsheng Li Lu Xu Yunfang Ni

作者单位: School of Instrument Science and Engineering, Southeast University, Nanjing, JiangSu, China;Key Laboratory of Micro Inertial Instrument and Advanced Navigation Technology of Ministry ofEducation, Southeast University, Nanjing, JiangSu, China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-6

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）