Design of MEMS Piezoelectric Vector Hydrophone

摘要：

　　This paper presents a novel micro-electromechanical systems (MEMS) piezoelectric vector hydrophone based on ZnO thin film.The approximate theory analysis is introduced in sensitivity and resonant frequency,and a simulation on the vector hydrophone is carried out by finite element method (FEM).Results of the theory analysis and FEM simulation agree well.The results show that the ratio of the piezoelectric layer thickness and Si layer thickness exists an optimum value for sensitivity,and MEMS piezoelectric vector hydrophones in smaller size have higher sensitivity than piezoresistive ones and are of passivity.

关键词： Vector hydrophone MEMS ZnO film

作者: Lu Ning Li Junhong Liu Mengwei Wang Chenghao

作者单位: Acoustical MEMS Laboratory, Institute of Acoustics, Chinese Academy of Sciences, Beijing,China Acoustical MEMS Laboratory, Institute of Acoustics, Chinese Academy of Sciences, Beijing,China;State

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-6

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）