A Trapezoidal Cantilever Density Sensor Based on MEMS Technology
A MEMS (Micro-Electro-Mechanical Systems) density sensor based on trapezoidal cantilever is researched in this paper.Density is an important thermophysical property of the fluid.The sensor measures the density of fluid by using the relationship between the density and the resonant frequency of cantilever immersed in the fluid.The modal analysis and harmonic response analysis of trapezoidal and rectangular cantilever are simulated by ANSYS software.The modal analysis result shows that the first-order resonant frequency of trapezoidal cantilever is higher than that of rectangle cantilever.And the harmonic response analysis result shows that when the size A×L of trapezoidal cantilever is 1000 μm×1500 μm,the first-order resonance maximum strain of trapezoidal cantilever with width B being 2500 μm gets maximum value in the five different widths,including 2100 μm,2300 μm,2500 μm,2700 μm and 2900 μm.In order to improve the density sensitivity of cantilever,the trapezoidal cantilever with the size A×B×L of 1000 μm×2500 μm× 1500 μm is selected to measure the densities of dimethyl silicone and toluene respectively at the temperature range of 30℃ to 55℃ and 26℃ to 34℃.Then the density measurements compared with the reference values,the deviations of dimethyl silicone and toluene density measurements from the reference values are less than 0.1% and 0.2% respectively.
MEMS Density Sensor Trapezoidal Cantilever Resonant frequency
Libo Zhao Longqi Xu Guiming Zhang Zhuangde Jiang Yu Qin Yulong Zhao Xiaopo Wang Zhigang Liu
State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an,Shanxi, Shaanxi Institute of Metrology Science,Xi’an, Shanxi, P. R. CHINA State Key Laboratory of Multiphase Flow in Power Engineering, Xi’an Jiaotong University, Xi’an,Shanx
国际会议
中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)
杭州
英文
1-6
2012-11-04（万方平台首次上网日期，不代表论文的发表时间）