Fabrication and Measurement of Wireless Pressure-sensitive Micro-device based on High Temperature Co-fired Ceramics (HTCC)

摘要：

　　The high temperature co-fired ceramics (HTCC) have wide applications with stable mechanical toughness,but they have not yet been used to fabricate sensors.By introducing the wireless telemetric sensor systems and studying on the ceramic structure embedding a pressure-deformable cavity,the new micro-devices made from HTCC materials (Zirconia and 96% Alumina) are designed and fabricated,and their capacity for pressure measurement is tested using wireless interrogating method.The experimental sensitivity of the device is 200 kHz/bar of Zirconia and 108 kHz/bar of Alumina below 5bar with readout distance 2.5cm.

关键词： high temperature co-fired ceramic pressure-sensitive

作者: ZHENG Shi-jun LIANG Ting Li-Ying Li-Jun Wang Ying-lin XIONG Ji-jun

作者单位: Key Laboratory of Instrumentation Science & Dynamic Measurement, North University of China,Taiyuan, The 2nd Institute of China Electronics Technology Group Corporation, Taiyuan, China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-4

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）