A Planar Capacitive Sensor for 2-Dimensional Long-range Displacements Measurement
A planar capacitive sensor (PCS) capable of 2-dimentional large scale measurement is presented in this paper.Displacement interpretation depends basically and independently on measuring the periodic variation in capacitance caused by the change of overlapped area of sensing electrodes on a moving plate and a fixed plate.Accumulating the number of quarters in each direction and the specific position in the final quarter,large scale measurement is fulfilled.X and Y direction displacements can be measured independently and simultaneously.A finite element simulation shows smaller gap distance and larger electrode length would guarantee better sensitivity.Experiments based on PCS prototype demonstrate that the PCS has a resolution of 0.038μm,and a sensitivity of 0.122mV/μm.High potential of PCS as an innovative 2-D long-range displacement sensor is authenticated.
Planar capacitive sensor displacement measurement 2-dimentional large scale measurement
J.P.Yu W.Wang K.Q.Lu D.Q.Mei Z.C.Chen
Department of Mechanical Engineering, Zhejiang University, Hangzhou 310027, P.R.China Department of Mechanical Engineering, Zhejiang University, Hangzhou 310027, P.R.China;School of Mech
国际会议
中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)
杭州
英文
1-6
2012-11-04（万方平台首次上网日期，不代表论文的发表时间）