System Simulation and Test of a Field Emission Accelerometer

摘要：

　　Field emission accelerometer work in vacuum environment,the negative exponential relationship between the current and the distance of the cathode and anode make the accelerometer has high sensitivity and serious non-linearity.A simulation method by using SIMULINK tools was put forward,and the system simulation model was proposed.The system simulation was carried out under low vacuum and high vacuum environment.On the guidance of the simulation result,the circuit was designed and the performance of accelerometer was tested.The result indicated that the accelerometer have good linearity and sensitivity.

关键词： Field emission Vacuum Simulink System simulation, PID

作者: LIU Hai-tao WEN Zhi-yu CHEN Li WEN Zhong-quan

作者单位: National Key Discipline Laboratory of Novel Micro/Nano Devices and Systems Technologies;National Center for International Research of Micro/Nano-System and New Material Technologies;Microsystem Research Center, Chongqing University, Chongqing, 400030, P. R. China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-5

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）