Platinum Resistance Microsensor for Cryogenic Temperature Measurement

摘要：

　　Platinum resistance temperature sensor is applied to the temperature range higher than 200K currently.Through studying the principle of platinum temperature sensor,the platinum resistance temperature microsensor can be used in the temperature region between 10K and 200K was studied.It employs symmetrical turn back structure,which effectively avoids the inductance caused by alternating current (AC).Fabrication process based on MEMS technology was illustrated.The platinum film was obtained by direct current (DC) magnetron sputtering deposition and the platinum resistance temperature microsensor was fabricated with 200nm thickness layer film.The relationship between resistance and temperature of platinum microsensor was tested by Quantum QD PPMS instrument.When T>30K and T<30K,TCR of platinum microsensor could achieve 16490ppm/K and 6430ppm/K respectively.Thus,the microsensor can be used as temperature sensing element between 10K and 200K in the cryogenics.

关键词： Cryogenics Temperature sensor MEMS Platinum

作者: Jiabing Mei Jingquan Liu Shuidong Jiang Bin Yang Chunsheng Yang

作者单位: Science and Technology on Micro/Nano Fabrication Laboratory, Research Institute of Micro/Nano Techno Science and Technology on Micro/Nano Fabrication Laboratory, Research Instituteof Micro/Nano Technol

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-6

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）