Thhe Study of free-standing diamond film SAWF

摘要：

　　Surface Acoustic Wave Filter (SAWF) is widely applied in military and civil fields as Radar,Broadcast,Television,etc.The SAWF that the central operating frequency exceeds 1 GHz is one of the key elements in modern high frequency communication system.In this paper,on the free-standing diamond film and silicon wafer substrates,two kinds of SAWF are manufactured.Based on the same IDT structure that the interdigital width is 3 μ m,the center frequency of ZnO/diamond structures can reach to 1.03 GHz,while the ZnO/Si structures is 120 MHz.The result express that the SAWF on the base of diamond can work in high frequency mode,while the Insertion Loss is high,reach to 23dB.

关键词： Diamond film SAWF ZnO

作者: Dongping Hu Jie Feng Li Tang

作者单位: China Acad Engn Phys, Inst structure mech, Mianyang 621900, Peoples R China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-5

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）