Magnetron sputtering Ni-Cr alloy thin film resistance temperature characteristic study

摘要：

　　Based on microelement manufacturing,semiconductor lithography technologies,The sensor chips fabricated to be small volume,high reliability,easy mass production,low cost,can resist to bad environment.In thin film pressure sensor chip,Ni-Cr alloy thin film is the key part,mostly influence the main electrical characteristics of the film pressure sensor chips.The resistance temperature characteristics changes on account of different proportions of Ni-Cr alloys.In this paper,two different proportions of Ni-Cr alloys were deposited and heat treated,the TCR of the alloys were tested,the causes were analyzed.

关键词： Ni-Cr alloy thin film magnetron sputtering resistance temperature characteristics

作者: Tang Li Hu Dong Ping

作者单位: Institute Of System Engineering, China Academy of Engineering Physics,MianYang,Sichuan Province, 621900

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-5

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）