Low stress MEMS delay mechanism

摘要：

　　For the existing symmetry Z-tooth MEMS delay mechanisms can not play sports in place under the influence of centrifugal force,this paper presents an asymmetric Z-tooth delay mechanism which can works reliably by weak environmental forces.Working principle and the stress condition of the mechanism are analyzed.Based on the dynamic model,this paper makes a computational analysis and simulation about the kinetic characteristics of the asymmetric Z-tooth delay mechanism,and the results show that the improved mechanism can works reliably and meets the requirements.

关键词： MEMS Delay mechanisms Z-tooth Weak environmental forces

作者: Guozhong Li Gengchen Shi Li Sui

作者单位: National Lab of Mechatronic Engineering and Control,Beijing Institute of Technology, Beijing100081, China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-6

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）