A novenovel noise resistance optical accelerometer based on micro-ring resonant cavity

摘要：

　　To meet a high-precision accelerometer resistance of temperature,humidity and other external noise,a new multi-ring cascade optical accelerometer structure is designed.The micro-ring resonator on the cantilever beam based on the photo-elastic effect and the contrast are fabricated with the same manufacturing process and size,which can effectively meet the consistency of the contrast and test micro-ring resonator on the cantilever.The one resonance point curve will split into two under the acceleration,thus the acceleration value can be obtained by detecting the wavelength of the two resonant points.By testing the cascade race-track shaped micro-ring resonator at different temperatures,the Q=104,the test requirement of cascade race-track shaped micro-ring accelerometer in different environments is greatly met.The design can be widely applied to the occasions of penetration system with high impact,strong vibration and so on.And the anti-noise and anti-jamming features of the integrated miniaturized high-sensitivity MOEMS sensors are realized.

关键词： External noise multi-ring cascade photo-elastic effect accelerometer cantilever

作者: WANG Xiao-qian YAN Shu-bin MA Ke-zhen XU Peng-fei ZHANG Wen-dong

作者单位: Key Laboratory of Instrumentation Science and Dynamic Measurement(Ministry of Education),North University of China, Taiyuan, Shanxi, China;Science and Technology on Electronic Test & Measurement Laboratory, North University of China,Taiyuan, Shanxi, China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-5

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）