Integrated-opti tenth-order micro-ring filters in silicon-on-insulator

摘要：

　　In the paper,it demonstrates highly integrated tenth-order filters in silicon-on-insulator (SOI).The micro-ring resonators have a small radius of 5μm and a very large free spectral range ~ 18nm at the 1.55μm communication band.For through port responses,the grating and the high-order optical filters with ten coupled micro-ring resonators are designed and demonstrated,and the grating response matches well with the experiment resonators.Devices were patterned with electron-beam lithography ( EBL).And SiO2 layer is covered on the silicon waveguide,thus reducing the propagation loss in micro-ring resonators.

关键词： SOI micro-ring resonators tenth-order optical filters electron-beam lithography

作者: YAN Shu-bin WANG Xiao-qian MA Ke-zhen MENG Xiang-ran ZHANG Wen-dong

作者单位: Key Laboratory of Instrumentation Science and Dynamic Measurement(Ministry of Education),North University of China, Taiyuan, Shanxi, China;Science and Technology on Electronic Test & Measurement Laboratory, North University of China,Taiyuan, Shanxi, China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-5

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）