The Characteristics of MEMS Based Seismic Sensors Using the Electrochemical Approach

摘要：

　　The characteristics of MEMS based electrochemical seismic sensors (EC seismic sensors) are presented in this paper.A numerical model is set up,and a series of vibration test is established.The numerical simulation and vibration test results are illustrated and the difference between them is discussed.

关键词： Electrochemical seismic sensor MEMS Low frequency characteristics

作者: Yunjie Fan Junbo Wang Tao Deng Deyong Chen Wentao He

作者单位: State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy ofSciences, Beijing, P.R. China, 100090

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-5

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）