A Novel Structure of Polyimide-Based Humidity Sensor Used in Low Temperature Environment

摘要：

　　In this paper,a new structure of polyimide-based humidity sensor is developed,which can work better at low temperature environment.In this humidity sensor,the capacitive part is sputtered on a suspended membrane,the lower electrode is also a controllable heater,used to control the temperature on the surface of the sensor through the external circuits.The results of experiment suggest that the sensor has a wide range of sensing ambient relative humidity from 10%RH to 90%RH with a controllable constant temperature and at a lower temperature it shows a good linearity.

关键词： Constant Temperature Impedance Humidity sensor Polyimide

作者: Li Xiao Zhan Zhao Lidong Du Zhen Fang ShaohuaWu

作者单位: State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy ofSciences, State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy ofSciences,

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-4

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）