DESIGDESIGN AND FABRICATION OF A LATERAL CONTACT RF-MEMS SWITCH FOR MM-WAVE APPLICATIONS

摘要：

　　Design,fabrication and test results of an electrothermally-actuated lateral DC-contact RF-MEMS switch for mm-wave applications are presented.The MEMS switch is simulated and optimized using Ansoft HFSS software.The size of the whole switch is only 1.2 mm × 1.4 mm in area.The measured transient times for switch-on and switch-off are 13.6 and 0.96 ms,respectively.Low insertion losses and high isolation of 0.17 dB and 26.7 dB,respectively,are obtained in the proposed switch at center frequency of 35GHz,the insertion losses less than 0.5dB and the isolation better than 22.5dB can be achieved in the proposed switch at 30~40GHz.The reasonable agreement between design and measurement is observed.

关键词： RF MEMS Switch Lateral contact Thermal actuation

作者: Yan-qing Zhu Lei Han

作者单位: Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing, 210096, China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-6

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）