A Low-Cost Uncooled Infrared Microbolometer Based on the Aluminum Micro-hot-plate Array in a Standard CMOS Technology

摘要：

　　This paper introduces the implementation of a low-cost 4×5 pixel array uncooled infrared microbolometer together with its integrated readout circuit in a standard 0.5μm CMOS technology and post-CMOS process.Each pixel,which has a size of 80μm×80μm,is a novel structure of aluminum micro-hot-plate (MHP) fabricated by etching the surface sacrificial layer without any additional masking and lithography procedure.The MPH consists of an aluminum thermistor and a thermally isolated micromachined membrane suspended by two arms.The thermal conductance,thermal time constant and thermal capacitance of the MPH are experimentally measured.

关键词： CMOS infrared detectors Microbolometer low-cost infrared detectors readout integrated circuits

作者: N.Shen Z.A.Tang C.Feng

作者单位: School of Electronic Science and Technology, Dalian University of Technology, Dalian, 116023,China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-5

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）