Resin-bonded NdFeB micromagnets for integration into electromagnetic vibration energy harvesters
A micromachining technique is presented for the fabrication of resin-bonded permanent magnets in the microscale.Magnetic paste has been prepared from NdFeB powder and an epoxy resin,filled into lithographically defined photoresist molds or metal molds,and formed into resin-bonded magnets after room temperature curing.coercivity of 772.4KA/m,remanence of 0.27T,and maximum energy product of 22.6kJ/m3 have been achieved in a NdFeB disk micromagnet with dimension of Ф200×70μm2.Based on the developed micro-patterning of resin-bonded magnet,A fully integrated electromagnetic vibration energy harvester has been designed and fabricated.The dimension of the energy harvester is only 4.5×4.5×1mm3 and the dimension of the micromagnet is 1.5×1.5×0.2mm3.This microfabrication technique of micromagnets can be used for producing tens or hundreds of micrometer permanent magnets in various magnetic devices.
NdFeB micromagnet resin-bonded electromagnetic vibration energy harvester
Peihong Wang Kai Tao Zhuoqing Yang Guifu Ding
School of Physics and Material Science, Anhui University, Hefei, 230039, China Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai, 200240, Chi
国际会议
中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)
杭州
英文
1-6
2012-11-04（万方平台首次上网日期，不代表论文的发表时间）