ZnO film based piezoelectric vibration energy harvester with two same sensing elements

摘要：

　　A ZnO piezoelectric vibration energy harvester with two ZnO sensing elements in parallel connection is presented.The ZnO thin film is deposited by using RF magnetron sputtering method and the energy harvester is fabricated by using MEMS micromachining technique.The natural frequency of the fabricated ZnO energy harvester is 1300Hz.The tested results showed that this energy harvester has better output performance than that of the energy harvester with traditional design.The load voltage is 2.06V under load resistance of 1MΩ and the maximal load power is 1.25μW under load resistance of 0.6MΩ,when the prototype is excited by an external vibration with frequency of 1300Hz and acceleration of 10m/s2.

关键词： ZnO thin film piezoelectric MEMS vibration energy harvester

作者: Peihong Wang Hejun Du

作者单位: School of Physics and Material Science, Anhui University, Hefei, 230039, China School of Mechanical and Aerospace Engineering, Nanyang Technological University, Singapore,639798,

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-6

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）