High Precision Low Power Quartz Tuning fork Temperature Sensor with Optimized Resonance Excitation
This paper presents the design,fabrication and characterization of quartz tuning fork temperature sensor which is based on new ZY-cut-quartz crystal bulk acoustic wave resonator vibrating in a flexural mode.Design and performance analysis of the quartz tuning fork temperature sensor has been conducted and the thermal sensing characteristics were examined by measuring the resonance frequency shift of this sensor cause by an external temperature.The sensor prototype was successfully fabricated and calibrated from operating from 0°C to 100°C with sensitivity of 70ppm/°C.Experimental results show the sensor has high thermal sensitivity,good stability and well reproducibility.This work represents high precision and low power temperature sensor using the comprehensive thermal characterization of ZY-cut-quartz tuning fork resonator.
Tuning fork ZY-cut quartz Quartz micromachining Thermal sensing Temperature sensor
Xu Jun Li Xin Duan Jin_Hua Xu Hai_Bo
Harbin University of Science and Technology, Harbin, Heilongjiang, CHINA Computer Center, Harbin University of Science and Technology, Harbin, Heilongjiang, CHINA
国际会议
中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)
杭州
英文
1-6
2012-11-04（万方平台首次上网日期，不代表论文的发表时间）