Mechanism Analysis of MEMS Viscometric Sensor for Glucose Detection
(0) The paper models one effective Bio-MEMS sensor to analyze the fundamental principle in the multi-physical field.Governed by the Reynold’s equation,the model is solved by a FEM software.The 90mg/dL glucose solution is adopted as the flow and the parylene film is taken as vibration diaphragm.A harmonic force at 1000 Hz is performed as the input response.The transient results demonstrate that the simulation is consistent with the theoretical model.The fluid-structure interaction phenomenon in the sensor is presented as well.Furthermore,the solution ranging from 30 to 360 mg/dL are analyzed respectively to research the different response.The results illustrates that with the concentration increasing,the displacement of vibration diaphragm or semi-permeable membrane decrease while the damping pressure caused by fluid motion grow linearly.
MEMS modeling Reynold’s equation FEM FSI
Jianguo Tao Hao Sun Zhanqiu Liu
Harbin Institute of Technology, China
国际会议
中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)
杭州
英文
1-6
2012-11-04（万方平台首次上网日期，不代表论文的发表时间）