The LQG Controller Design for Micromachined Tunneling Accelerator
To enlarge the dynamic measurement range and improve the performance by reducing the influence of the main noise including thermo-mechanical noise,1/f mechanical and tunneling noise,Johnson noise,and shot noise,tunneling sensors usually are operated in a closed-loop mode.Under the assumption that these noises are approximately Gaussian and the tunneling current/gap exponential relationship can be linearized by small-signal linearization,the Linear Quadratic Gaussian (LQG) optimal controller was designed for our micromachined tunneling accelerator (MTA) to maintain a constant tunneling gap.The closed-control system using LQG control methodology showed an increase of more than 24 dB in signal-noise ratio compared to uncontrolled accelerator.Simulated and experimental results indicated that the distance from the proof mass to the tunneling electrode was effectively regulated to its nominal value of 1 nm thanks to Kalman state estimator associated with the LQG controller.
Closed-loop microsystems Tunneling accelerator Controller design LQG
Yifang Liu Dezhi Wu Gaofeng Zheng Xiaohui Du Daoheng Sun
Dept. of Mechanical and Electrical Engineering , Xiamen Univ., Xiamen 361005 , China Dept. of Aeronautics, Xiamen Univ., Xiamen 361005, China
国际会议
中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)
杭州
英文
1-6
2012-11-04（万方平台首次上网日期，不代表论文的发表时间）