Optimization of Micro-electroforming Process for the Fabrication of a Low Deformation Nickel Mold
Micro electroforming is an effective technique to fabricate metal mold which can be used for the replication of micro-features.Bend of the metal mold will bring adverse effects on the size precision of replicated microstructures.In this paper,micro electroforming process parameters are optimized to obtain low deformation mold.The electroforming solution contains 80-90 g/l nickel (Ni) ion,40-45 g/l boric acid and 0.3 %/l wetting agents.Its PH is 3.7-4.2.Electroforming temperature is controlled at 50-55 oC.The pulse current is used during electroforming with a density of 2-3 A/dm2 and a duty cycle of 0.2.Results have shown that the deformation of the metal mold has been reduced 19 % by using the optimized parameters.A nickel mold,which contains micro-features of 5 μm-wide and 5 μm-high,is fabricated for hot embossing.
Micro electroforming Micro Nickel mold Low deformation Optimization of parameters
Ke Xue Liu Chong Li Jingmin Duan yajie
Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian 116024, China Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian 116024, China;Key L
国际会议
中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)
杭州
英文
1-6
2012-11-04（万方平台首次上网日期，不代表论文的发表时间）