Two-stage Decoupled Micro-machined Gyroscope and Non-contact Vibration Test

摘要：

　　By introducing the working principle of the two-stage decoupled micro-machined gyroscope,it establishes the vibration equation of the driving mode.Using Laplace transform,it solves the differential equation,the analytical solution and the amplitude-frequency characteristics of the driving mode are obtained.Moreover,the paper introduces the hardware of the non-contact vibration measuement system and the algorithm.By experiments,the characteristic of vibration of the test micro machined gyroscope is obtained.Experimental results indicate that the precision of the amplitude is 0.1μm and the two-stage decoupled micro-gyrscope is reliable.

关键词： decoupling, micro-machined gyroscope non-contact vibration measurement

作者: Yao Fenglin Gao Shiqiao Zhao Jie Liu Haipeng Niu Shaohua Jin Lei

作者单位: School of Mechatronical Engineering, Beijing Institute of Technology, 5South Zhongguancun Street, Ha School of Mechatronical Engineering, Beijing Institute of Technology, 5South Zhongguancun Street, Ha Department of Computer Engineering, Taiyuan University,Shanxi,China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-6

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）