Numerical analysis of molding process for roll imprinting based on ABAQUS
To optimize the molding parameters investigating based on Finite Element Analysis is done for roll imprinting.The heat curable material PMMA is employed in the simulation,which is considered as an elastic perfectly-plastic material.Three factors are taken as the evaluation criterions,which are pattern transfer rate,maximum width ratio and maximum depth ratio.Several key parameters,such as the pattern size,the distance between mold and surface of PMMA,the duty cycle of the patterns,rotation velocity of the mold and Young’s modulus of the PMMA and pressing force,are analyzed systematically.Simulation show three of them are main influence factors on the imprinting quality,which are the distance between roller and surface of the polymer,the duty cycle of the patterns and the elastic modulus of the polymer.While the influence of pattern size and rotation speed can be ignored.The results indicate that the duty cycle should be greater than 2 and the distance between roller periphery and surface of the polymer should be -30um to ensure the fidelity of the pattern replication,.The simulation results are significant for optimizing the parameters in the imprinting process.
Roll imprinting Finite element analysis Thermal embossing Deformation
Huichun Ye Yang Liu Lianguan Shen Mujun Li
Department of Precision Machinery and Precision Instrumentation, University of Science andTechnology of China, Hefei, Anhui 230026, People’s Republic of China
国际会议
中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)
杭州
英文
1-5
2012-11-04（万方平台首次上网日期，不代表论文的发表时间）