Analysis of Fabrication Errors on Micro-spring’s Elastic Coefficient

摘要：

　　Because fabrication errors have a great influence on micro-spring’s elastic coefficient,and it is difficult to reduce the influence through fabrication process methods at this stage,the authors propose solutions through design process to reduce the sensitivity of Elastic coefficient of fabrication errors.The authors derived error propagation formula through multivariate function Taylor series expansion method,and made a quantitative analysis of the influence of fabrication errors,then summarized the influence rules of the size parameters on dispersibility of elastic coefficient K,finally proposed the method to degrade device performance dependent on the fabrication precision.

关键词： fabrication errors elastic coefficient errors transfer function microdevice design

作者: Shu Xin Lou Wenzhong Zhao Yue Guo Mingru Fu Yue Wang Ying

作者单位: State Key Laboratory of Mechatronics Engineering and Control, Beijing Institute of Technology,Beijin State Key Laboratory of Mechatronics Engineering and Control, Beijing Institute of Technology,Beijin

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-5

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）