The Reliability of Micro-spring Under Dynamic Circumstances
This article mainly focuses on the reliability of micro-spring,which as a typical component of MEMS device,applies electrodeposited nickel material and is fabricated by LIGA process,being used under the circumstances like transporting and restoring which may induce shock and crash.Griffith theory of brittle fracture and Abaqus FEA simulation software are applied for analyzing the probable failure modes of the micro-spring as overloaded.And the regime of elastic deformation,energy-time and displacement-time variation curves are given by three groups of simulation experiments.It proves to be one novel method to evaluate the reliability and accelerate exposing the failure mode of these MEMS components under dynamic circumstances in short period.After comparison,this method is proved reliable for analyzing and providing evidence for enhancing the reliability of the micro-spring,also improving the performance in micron size.
Micro-spring reliability Griffith theory of brittle fracture dynamical circumstances
Lou Wenzhong Liu Peng Li Kang Ding Xuran
State Key Laboratory of Mechatronics Engineering and Control, Beijing Institute of Technology,Beijin School of Electronic and Optical Engineering, Nanjing University of Science and Technology,Nanjing,
国际会议
中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)
杭州
英文
1-4
2012-11-04（万方平台首次上网日期，不代表论文的发表时间）