Nonlinearity analysis of closed-loop ΣΔ micro-mechanical accelerometer

摘要：

　　A high-order interface circuit based on sigma-delta (ΣΔ) modulation is advantageous to enhance the resolution and reduce the quantization noise of micro-accelerometer,while the performance is restricted by the effect of nonlinearity of op-amp,electrostatic force feedback and quantizer.A fifth-order closed-loop ΣΔ capacitive accelerometer is proposed in this paper and a theoretic nonlinearity of the accelerometer was investigated.The nonlinear behavioral models based on SIMULINK are given in the paper.The simulation and test result are presented through optimization based on the nonlinearity analysis at last.

关键词： nonlinearity sigma-delta accelerometer

作者: Xiaowei Liu Bingjun Lv Honglin Xu Jiajun Zhou Song Chen Jian Yang

作者单位: MEMS Center, Harbin Institute of Technology, Harbin, Heilongjiang, China;Key Laboratory of Micro-Sys MEMS Center, Harbin Institute of Technology, Harbin, Heilongjiang, China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-6

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）