Design of Monolithic Differential Quartz Vibrating Beam Accelerometer with Optimized Electrode Layout

摘要：

　　The electrode layout determines the piezoelectric performance of quartz resonator and directly affects the precision of the quartz VBA.We presented a novel monolithic differential quartz VBA with optimized electrode layout and solved the lock-in problem due to mechanical coupling.Based on the mass-equivalent system,an analytical model was developed and the uncoupling condition of the monolithic differential quartz VBA was deduced.Then we proposed five different electrode layouts and the optimum one was determined via simulation of piezoelectric and harmonic characteristics of quartz resonator with ANSYS.As a result,the mechanical coupling can be eliminated and at the same time,±100 g measurement range and 80Hz/g scale factor can be achieved.The optimum electrode layout can drive quartz resonator in the desired modal.The presented device with advantages of miniaturization,low mechanical coupling,none assembly errors and high electromechanical coupling efficiency is very promising in the high-precision quartz VBA.

关键词： monolithic differential vibrating beam accelerometer quartz resonator electrode layout finite element analysis

作者: Wenpu Wang Zhen Zhou Lishuang Feng Baoyin Yao Gongliu Yang Yinzhou Zhi

作者单位: Fundamental Science on Novel Inertial Instrument & Navigation System Technology Laboratory,Beihang University, Beijing 100191, CHINA;Full Key Laboratory of Micro-nano Measurement-manipulation and Physics(Ministry of Education),Beihang University, Beijing 100191, CHINA

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-6

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）