High Q, High Frequency High Overtone Bulk Acoustic Resonator with ZnO Films

摘要：

　　Bulk acoustic wave resonators with piezoelectric films have been widely explored for the small size and high quality factor at GHz.This paper describes high overtone bulk acoustic resonator (HBAR) based on Al/ZnO/Al sandwich layers and sapphire substrate.The fabricated HBAR presents the best acoustic coupling and highest Q (above 25,000) at around 2.4GHz,which agrees with the simulation results based on one-dimensional Mason equivalent circuit model.The HBAR also demonstrates the high Q of 30000 and 6500 at 1.5 and 3.4GHz,respectively.It is indicated that the HBAR has potential application for the low phase noise high frequency oscillator.

关键词： Bulk acoustic wave resonator Quality factor ZnO film Mason model

作者: Mengwei Liu Mingbo Zhu Junhong Li Chenghao Wang

作者单位: Acoustical MEMS Laboratory, Institute of Acoustics, Chinese Academy of Sciences, Beijing,CHINA Acoustical MEMS Laboratory, Institute of Acoustics, Chinese Academy of Sciences, Beijing,CHINA;State

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-4

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）