Ultrahigh-resolution MEMS Humidity Sensing Elements Based On Film Bulk Acoustic Wave Resonators

摘要：

　　A high-resolution humidity sensor based on MEMS FBAR with spin-coated PVA thin film is reported.The sensors exhibit very high sensitivity to water vapor and are able to detect down to 0.08 % change in relative humidity by monitoring the shift in series resonant frequency of the FBARs.The integration of these devices with CMOS oscillating circuits and RF front-end chips will create great potential of FBAR based mass sensors in a wide variety of applications in chemical and biological sensing.

关键词： Humidity sensor MEMS Bulk acoustic wave resonato

作者: Hongyuan Zhao Daihua Zhang Wei Pang Hao Zhang

作者单位: State Key laboratory of Precision Measuring Technology and Instruments, TianjinUniversity, Tianjin, China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-6

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）