Micro-displacement sensing circuit for gyroscope with levitated rotor

摘要：

　　This paper presents a micro-displacement sensing circuit,which can detect sensing capacitors of levitated rotor.To ensure the high resolution,noise analysis of pre-amplifier of micro-displacement sensing circuit is conducted.The results show that choosing low noise amp and decreasing Cf /C1 can reduce the electronic noise.

关键词： Gyroscope Levitated rotor Micro-displacement sensing circuit

作者: Ren Mingyuan Liu Xiaowei Zuo Wen Mao Zhigang

作者单位: Department of Microelectronics, Harbin Institute of Technology, Harbin, Heilongjiang, China;School o Department of Microelectronics, Harbin Institute of Technology, Harbin, Heilongjiang, China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-4

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）