Fundamental Study of the Micro-cantilever for More Sensitive Surface Stress-based Biosensor
Surface stress-based biosensors as a crucial part of micro-scale and label-free system,use free energy change,the underlying concept in any binding reaction,have been investigated extensively in recent years.In this paper,a new bi-micro-cantilever surface stress biosensor is proposed which can be used to detect cells.Some fundamental study has been done,especially for the micro-cantilever due to its crucial role in the whole system.To acquiring the optimal material for more sensitive sensor,four material,Si,SiN,AlN,PMMA(polymethylmethacrylate),were contrastively analyzed under the same conditions (loads,size,environmental factor.etc) by finite element (FE) method.This study could provide some foundation for the biosensor design and fabrication.
Surface Stress Biosensor BioMEMS Micro-cantilever
Hui Feng Shengbo Sang Wengdong Zhang Gang Li Pengwei Li Jie Hu Shaobo Du Xiujuan Wei
MicroNano System research Center, Taiyuan University of Technology, Taiyuan, Shanxi,China;Key Lab of Advanced Transducers and Intelligent Control System of the Ministry of Education,Taiyuan University of Technology, Taiyuan, Shanxi, China
国际会议
中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)
杭州
英文
1-6
2012-11-04（万方平台首次上网日期，不代表论文的发表时间）