Modeling Analytically the Pull-in Voltage of Double-Cantilever Structure
This paper presents an analytical model based on the basis finite element analysis to solve the nonlinear behavior of double-cantilever structure.The structure beam is replaced with a series of beam elements by traditional finite element method.The deformation curve of the beam is calculated by gradually loading voltage in small increments,and pull-in behavior is identified when the convergence of the deflection iteration cannot be achieved after voltage increment.This method considers the effect of deformation on stiffness by establishing a new equivalent stiffness matrix for each voltage step on the basis of the results of previous steps.Through this approach,we prevent the approximate errors of the stiffness matrix from accumulating.The analytical results show good agreement with those obtained by using multiphysics coupling software.
MEMS double-cantilever structure finite element pull-in
Huijung Yu Huaqing Sheng Wu Zhou Beipeng
School of Mechatronics Egineering, University of Electronics Science and Technology, Chengdu 611731, SC, Chinar
国际会议
中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)
杭州
英文
1-4
2012-11-04（万方平台首次上网日期，不代表论文的发表时间）