Research on micro twin-bridges catalytic combustion type kerosene gas sensor technology
Based on the principle of catalytic combustion type gas sensor,a kerosene gas sensor with micro twin-bridge structure is fabricated using silicon micromachining technology.A pair of platinum film resistor is fabricated by planar film process,and its nominal resistance is 20Ω at 0℃.The nano-alumina catalytic carrier and noble metal catalyst are coated on the surface of sensitive resistance in order to form the sensitive bridge and compensating bridge.The monolithic integration of catalytic element and compensating element is achieved on the silicon micro twin-bridge for fabricating kerosene sensor.The simulation result shows that once temperature of one bridge rises to 650K,the other bridge may increases about 10℃.The test on kerosene sensor by calibration device indicates that the sensor can detect the kerosene volume fraction ranging from 0 to 7000×10-6 and the sensor output property is linear.
Micro twin-bridge Catalysis Kerosene sensor
WANG Ping ZHANG Hong-quan ZHANG Tong WANG Bo-ran WEN Dian-zhong
Heilongjiang University, Harbin 150080, China 49th Research Institute of China Electronics Technology Group Corporation,Harbin150001, China The University of Auckland, Auckland 1010, New Zealand
国际会议
中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)
杭州
英文
1-5
2012-11-04（万方平台首次上网日期，不代表论文的发表时间）