Research on the method of laser trimming to reduce the mode coupling error of micro-machined vibratory gyroscopes
Large mode coupling error would seriously restrict the improvement of gyroscope performance.In order to decrease the adverse influence from mode coupling error,this paper studied the formation mechanism of mode coupling error for a micro-machined vibratory gyroscope and certified the result studied by ANSYS analysis.Based on our analysis,it is found that removing material from both sides of the center lines of oscillation could arouse errors of anti-phase each other,which demonstrates that trimming could reduce mode coupling error on the other hand.Finally,experimental study was implemented on the micro-machined vibratory gyroscope by UV laser micromachining technology.Results indicated that laser trimming method on the basis of the phase relationship between mode coupling error signal and driving signal could effectively degrade the error.For certain prototype,the peak-peak voltage of the mode coupling error could be reduced from 6.6V to 0.2V after trimming when there is no angular velocity input.
micro-machined vibratory gyroscope mode coupling laser trimming center line of oscillation
Cui hongjuan He kun Xiao dingbang Hou zhanqiang Liu xue Wu xuezhong Su jianbin
College of Mechatronics Engineering and Automation,National University of Defense Technology, Changsha 410073, China
国际会议
中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)
杭州
英文
1-6
2012-11-04（万方平台首次上网日期，不代表论文的发表时间）