A Study on Friction Properties of DLC Film on Different Metal Substrates

摘要：

　　In this study a method to deposit DLC film at home temperature had been explored by DC-CVD.The a-Si:H intermediate material was intercalated between substrate and DLC film,and the friction properties of a-Si:H:DLC film deposited on different metal substrates were researched.The bonding strength at the interface is greatly improved by intercalating a-Si:H intermediate layer,DLC film is completely worn out without delaminating,the maximum thickness of film deposited by the device is less than 3.3 μm,the failure lifetime within the thickness of 1μm is up to 70 million cycles as applying load P=2.94N (point load),and the friction coefficient between DLC film and SiC,Si3N4,SUS304,SUJ2 is about 0.1~0.15.

关键词： CVD DLC film Intermediate material Friction properties Failure lifetime

作者: Jinhua Zheng Conghui Li Chong Zhang Yunfeng Chao Longjun Li Yinghua Wu

作者单位: Departments of Thermal Energy ＆ Power Engineering, School of Chemical Engineering andEnergy, Zhengzh Departments of Thermal Energy ＆ Power Engineering, School of Chemical Engineering andEnergy, Zhengzh Zhongshan Triumph Vacuum Technology Engineering Co., Ltd. Zhongshan528478, China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-4

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）