Study on the Performance of Y-branch Waveguide Modulator Affected by the Fabrication

摘要：

　　The performance of Y-branch waveguide (YBW) modulator which is affected by the fabrication has been researched.The range of Y-branch corner deviation is obtained by analyzing the structural loss of the branch in the YBW which is limited by fabrication resolution.The effects on splitting ratio,mode field and coupling loss of YBW are also discussed through changing the waveguide width.It can be obtained that the difference between the two widths should be less than 0.25μm to meet the requirement of 5% error.And the maximum coupling efficiency can be achieved by adjusting the fabrication of waveguide to change the waveguide mode field.The corresponding fabrication tolerance can be attained based on the analysis.

关键词： Y-branch waveguide Fabrication deviation Structural loss Splitting ratio Coupling loss

作者: LIU Huilan WANG Wei WANG Junjie SUN Guoming HUO Guang ZHOU Chaochao

作者单位: School of Instrumentation Science and Opto-electronics Engineering, Beihang University, Beijing,Chin School of Instrumentation Science and Opto-electronics Engineering, Beihang University, Beijing,Chin List Flight Automatic Control Research Institute, Xi’an, Shaanxi, China, 710065

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-5

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）