Fabrication of MEMS-based Micro Direct Methanol Fuel Cell Using Porous Silicon as Catalysts Substrates

摘要：

　　In order to further miniaturize the silicon-based micro direct methanol fuel cell (μDMFC),a novel method of fabricating MEMS-based single is μDMFC introduced.Using the silicon micromachining techniques,including thermal oxidation,optical lithography,wet etching,silicon anodization,physical vapor deposition,electroless plating,laser beams cauterization,and anodic bonding,we have successfully made single μDMFC as small as 10mm×8mm×3mm.First a porous silicon (PS) layer used as single cells substrate is formed by anodic etching in a HF-ethanol solution which is considered an effective and cheap fabrication method.Differs from other researchers,the electrocatalysts layer is deposited by electroless plating platinum or platinum and ruthenium (Pt-Ru) co-deposition over PS substrates.Catalyst being deposited over PS brings three-dimensional features,and the non-planar interfaces for the catalytic electrodes will increase the active surface area within a stated volume.Additionally,as high as 95% the utilization ratio of noble metal in electroless plating solution leads economizing platinum and ruthenium.SEM,EDX are employed to analysis the PS and catalyst layer.Moreover,using the MEMS technology makes the batch fabrication of μDMFC much easier and can reduce the usage of rare metals.

关键词： micro direct methanol fuel cell MEMS porous silicon electroless deposition

作者: Chunguang Suo Xiaowei Liu Wenbin Zhang Hua Wang

作者单位: Metallurgical Engineering Postdoctoral Flow Station, Kunming University of Science andTechnology, Ku MEMS Center, Harbin Institute of Technology, Harbin, China Faculty of Mechanical and Electrical Engineering, Kunming University of Science and Technology,Kunmi

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-9

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）