Effect of the surface roughness on the detecting capacitance

摘要：

　　With the MEMS technology advancement,electronic devices are miniaturized at every development node.The surface roughness is affecting the detecting capacitance of MEMS device because surface to volume ratio is increasing rapidly.A novel model with one rough electrode is investigated in this paper.The impacts of surface roughness on detecting capacitance are analyzed.The image of height percentage is used to describe the surface roughness of electrode sample.The function of the surface roughness is obtained according the method of curve fitting.The effect of surface roughness on the capacitance is calculated.The results demonstrate the capacitance increases with the surface roughness.

关键词： surface roughness capacitance effect modeling, MEMS device

作者: Haifeng Zhang Xiaowei Liu Hai Li Nan Chen Yibo Fu

作者单位: Key Laboratory of Micro-systems and Micro-structures Manufacturing(Harbin Institute ofTechnology), M MEMS Center, Harbin Institute of Technology, Harbin, CHINA

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-6

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）