Porous Silicon based Sensors and Filters

摘要：

　　Optical multilayers based on porous Silicon are used for sensing gaseous or liquid analytes.By tight pore size control and pore size in the range of some nm freestanding porous Silicon filters can be used for ultra- and nanofiltration.By a proper functionalization of the inner pore surfaces response time for sensing or filtering is in the order of seconds.The transport of aqueous solutions in the nanostructured material has been investigated.Combination of sensing and filtration effects and application of an effective surface stabilization provides improved selectivity and long-time stability of porous silicon based sensor systems.

关键词： Porous Silicon ultrafiltration optical sensors multilayer sensors pore size control

作者: U.Mescheder A.Kovacs

作者单位: Department Computer&Electrical Engineering, Furtwangen University, Robert-Gerwig-Platz 1,Furtwangen, Department Computer&Electrical Engineering, Furtwangen University, Robert-Gerwig-Platz 1,Furtwangen,

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-4

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）