Analysis of an Electrostatic Micro-Actuator Based on Vertically-Horizontally Bending

摘要：

　　For the problems of the oversized voltage and undersized displacement in the electrostatic micro actuator of transverse loading recently,a silicon micro actuator model with characteristics of large-displacement and low-voltage is presented based on the principle of vertically-horizontally bending.The deflection equation of the micro actuator is derived.The axial static electricity,temperature stress and axial squeezing pressure on the deformation of micro-beam are analyzed.The simulation shows that the displacement is as big as 17.5μm when the driving voltage is as low as 5V.The displacement is much larger than the deformation of the current micro actuator.

关键词： MEMS Micro-Actuator Vertically-Horizontally Bending Deflection Equation

作者: Wenchao Tian Yintang Yang

作者单位: School of Electro-Mechanical Engineering, Xidian University, Xi’an, 710071, China School of Micro Electron, Xidian University, Xi’an,710071, China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-6

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）