The study on the analytic model and Design Software for IP of piezoresistive cantilever beams

摘要：

　　Piezoresistive sensor was one of the earliest silicon MEMS devices,which based on the theory of piezoresistive.In order to build the piezoresistive IP library for the MEMS foundry,we improved the structures of the piezoresistive based on the achievement of Liwei Lin1,and new analytic model and design software for square shape membrance has been developed.The ability to calculate sensitivity and linearity of MEMS piezoresistive sensor using the new model have been demonstrated.As results,output voltage,sensitivity and linearity characteristics of MEMS sensor are presented in this paper.

关键词： piezoresistive MEMS sensor cantilever beams soft IP

作者: Jianlong Zhu Weihua Li Zaifa Zhou Qingan Huang

作者单位: Key Laboratory of MEMS of Education Ministry, Southeast University, Nanjing, 210096, China

会议类型: 国际会议

会议名称: 中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)

会议地点: 杭州

会议语种:英文

页码: 1-4

在线出版日期: 2012-11-04（万方平台首次上网日期，不代表论文的发表时间）