Photothermal microactuators fabricated by LIGA technology
A novel microactuator based on photothermal expansion is introduced,which is actuated by laser beam eliminating external circuit.The mechanism of the photothermal expansion is theoretically analyzed,and the working principle of a U-shaped photothermal microactuator with two arms is introduced and the lateral deflection is calculated.LIGA technology involving X-ray lithography and electroplating is introduced to fabricate photothermal microactuators.The fabrication process with LIGA technology is introduced and important details such as X-ray mask and electroplating are discussed.Photothermal microactuators with different structures are fabricated by LIGA technology at Beijing Synchrotron Radiation Facility (BSRF) and tests are carried out with laser beam.The deflection of a V-shaped photothermal microactuator of Ni material can reach 25.8μm under the control of a 1064 nm,800mW laser and a U-shaped can reach about 11μm at an 808nm,600mW laser.
photothermal microactuator thermal expansion LIGA technology
Bo Wang Bin Shi Futing Yi Dongxian Zhang Haijun Zhang Tianchong Zhang Jing Liu Lina Ma
Institute of High Energy Physics of Chinese Academy of Science, Beijing, China State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou, China Institute of High Energy Physics of Chinese Academy of Science, Beijing, China;Graduate University o
国际会议
中国微米纳米技术学会第14届学术年会、第3届国际年会暨第6届微米纳米技术“创新与产业化国际研讨与展览会(CSMNT2012 & ICMAN2012)
杭州
英文
1-4
2012-11-04（万方平台首次上网日期，不代表论文的发表时间）